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Electrochemical synthesis of barium titanate thin films

Published online by Cambridge University Press:  31 January 2011

R. R. Bacsa*
Affiliation:
Center for Dielectric Studies, Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
G. Rutsch
Affiliation:
Center for Dielectric Studies, Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
J. P. Dougherty
Affiliation:
Center for Dielectric Studies, Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
*
a) Author to whom all correspondence may be addressed.
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Abstract

Polycrystalline films of barium titanate (BaTiO3) have been synthesized on titanium (Ti) substrates by the galvanostatic anodization of Ti in a solution of 0.4 M Ba(OH)2. Crystalline films are formed at temperatures under 100 °C within 10 min at a current density of 25 mA/cm2 at atmospheric pressure. Crystallinity of the films is found to increase with both current density and time of reaction. At 90 °C, a film of 1 μm thickness is formed after 10 min; grain sizes up to 0.5 μm are obtained. Microstructure of the films is found to be critically dependent on the pretreatment of the titanium anode. Capacitance measurements on the film yield a dielectric constant of 200 with a minimum tan delta of 0.09 at 10 kHz. On the basis of the voltage-time curves, it is interpreted that an amorphous intermediate is formed which crystallizes to form perovskite BaTiO3.

Type
Articles
Copyright
Copyright © Materials Research Society 1996

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References

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