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Effect of residual stress and adhesion on the hardness of copper films deposited on silicon

Published online by Cambridge University Press:  31 January 2011

W. R. LaFontaine ,
B. Yost  and
Che-Yu Li
W. R. LaFontaine
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
B. Yost
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
Che-Yu Li
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
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Abstract

Continuous indentation testing was used to measure the hardness as a function of indentation depth, of three micron thick copper films deposited on silicon with an intermediate layer of 20 nm thick chromium or titanium. Three different indenters, a nearly perfect Vickers, a Vickers with a 1.2 μm2 flat, and a Pyramid with a 25 μm2 flat were employed. The hardness data suggest that the titanium interlayer produced significantly greater film/substrate adhesion than the chromium interlayer. A compressive residual stress, which relaxed with time, was detected in the samples with the titanium interlayer.

Type
Articles
Information
Journal of Materials Research , Volume 5 , Issue 4 , April 1990 , pp. 776 - 783
Copyright
Copyright © Materials Research Society 1990

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References

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