Hostname: page-component-848d4c4894-ndmmz Total loading time: 0 Render date: 2024-05-01T21:58:42.175Z Has data issue: false hasContentIssue false
  • English
  • Français

Direct inkjet printing of composite thin barium strontium titanate films

Published online by Cambridge University Press:  31 January 2011

T. Kaydanova ,
A. Miedaner ,
C. Curtis ,
J. Alleman ,
J.D. Perkins ,
D.S. Ginley ,
L. Sengupta ,
X. Zhang ,
S. He  and
L. Chiu
...Show all authors
T. Kaydanova
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
A. Miedaner
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
C. Curtis
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
J. Alleman
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
J.D. Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
D.S. Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Sengupta
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
X. Zhang
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
S. He
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Chiu
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Sengupta
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
X. Zhang
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
S. He
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
L. Chiu
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
Get access

Abstract

Composite Ba0.6Sr0.4TiO3/MgO thin films with 60% tuning and tan [H9254] of 0.007 at 2 GHz were deposited using metal organic decomposition inks by spin coating on single crystal MgO substrates. The films with approximately 1 mol% MgO in Ba0.6Sr0.4TiO3 had a better tuning/loss ratio than either the 0 or the 10 mol% MgO substituted films. Crystalline Ba0.5Sr0.5TiO3 films were produced on both MgO and alumina substrates by inkjet printing of metalorganic precursors with subsequent thermal decomposition followed by annealing at 900°C. Barium strontium titanate lines as narrow as 100 μm were printed on the alumina substrates. The inkjet-printed films were predominantly (100) oriented on MgO and (110) oriented on alumina. The crystalline quality of the inkjet-printed films was improved by annealing at 1100°C for 3 h in oxygen. Both the printed and the spin-coated films had smooth surfaces (300 Å root-mean-square roughness) as required for subsequent deposition of high-resolution metal electrodes. An inkjet-printed Ba0.5Sr0.5TiO3 film (3500 Å) on MgO annealed at 1100°C had 20% tunability of the dielectric constant (ε) at 9.1 V/μm direct current bias and tan δ < 0.002 at 1 MHz.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 12 , December 2003 , pp. 2820 - 2825
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Kozyrev, A., Ivanov, A., Keis, V., Khazov, H., Osadchy, V., Samoilova, T., Soldatenkov, O., Pavlov, A., Keopf, G., Mueller, C., Galt, D., and Rivkin, T., in 1998 IEEE MTT-S International Microwave Symposium Digest; Vol. 2, edited by Meixner, R. (IEEE, New York, NY and Baltimore, MD, 1998), pp. 985–988.Google Scholar
2.Keuls, F.W. Van, Romanofsky, R.R., Varaljay, N.D., Miranda, F.A., Canedy, C.L., Aggarwal, S., Venkatesan, T., and Ramesh, R., Microwave Opt. Technol. Lett. 20, 53 (1999).3.0.CO;2-L>CrossRefGoogle Scholar
3.Gevorgian, S.S., Carlsson, E.F., Rudner, S., Helmersson, U., Kollberg, E.L., Wikborg, E., and Vendik, O.G., IEEE Trans. Appl. Supercond. 7, 2458 (1997).CrossRefGoogle Scholar
4.Sengupta, L.C., Ngo, E.H., and Synowcznski, J., Integrated Ferroelectrics 17, 287 (1997).CrossRefGoogle Scholar
5.Sengupta, S., Stowell, S., Sengupta, L., Joshi, P.C., Ramanathan, S., and Desu, S.B., US Patent No. 6 071 555 (2000).Google Scholar
6.Cox, W.R. and Chen, T., Optics Photonics News 12, 32 (2001).CrossRefGoogle Scholar
7.Wallace, D.B., Cox, W.R., and Hayes, D.J., in Direct-Write Technologies for Rapid Prototyping Applications, edited by Pique, A. and Chrisey, D.B. (Academic Press, 2002), p. 177.CrossRefGoogle Scholar
8.Galt, D., Rivkina, T., and Cromar, M.W., in Ferroelectric Thin Films VI, edited by Treece, R.E., Jones, R.E., Foster, C.M., Desu, S.B., and Yoo, I.K. (Mater. Res. Soc. Symp. Proc. 493, Warrendale, PA, 1998), pp. 341–346.Google Scholar
9.Shaikh, A.S. and Vest, G.M., J. Am. Ceram. Soc. 69, 682 (1986).CrossRefGoogle Scholar
10.Rivkin, T.V., Carlson, C.M., Parilla, P.A., and Ginley, D.S., Integrated Ferroelectrics 29, 215 (2000).CrossRefGoogle Scholar
11.Gevorgian, S.S., Martinsson, T., Linnér, P.L.J., and Kollberg, E.L., IEEE Trans. Microwave Theory Techniques 44, 896 (1996).CrossRefGoogle Scholar
12.Cullity, B.D. and Stock, S.R., in Elements of X-ray Diffraction, 3rd ed. (Prentice Hall, Reading, MA, 2001), p. 365.Google Scholar
13.Adachi, M., Harada, J., Ikeda, T., Nomura, S., Sawaguchi, E., and Yamada, T., in Oxides; Vol. New Series, Vol. III/16a, edited by Hellwege, K.H. (Springer-Verlag, New York, 1981), p. 296.Google Scholar
14.Pertsev, N.A., Zembilgotov, A.G., and Tagantsev, A.K., Phys. Rev. Lett. 80, 1988 (1998).CrossRefGoogle Scholar