Skip to main content Accessibility help
×
Home

Diamond nucleation from the gas phase: A kinetic approach

  • E. Molinari (a1), R. Polini (a1), V. Sessa (a1), M.L. Terranova (a1) and M. Tomellini (a1)...

Abstract

Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.

Copyright

References

Hide All
1Molinari, E., Polini, R., Terranova, M.L., Ascarelli, P., and Fontana, S., J. Mater. Res. 7, 1778 (1992).
2Frenklach, M. and Spear, K.E., J. Mater. Res. 3, 133 (1988).
3Frenklach, M. and Wang, H., Phys. Rev. B 43, 1520 (1991).
4Tomellini, M., Polini, R., and Sessa, V., J. Appl. Phys. 70, 7573 (1991).
5Avrami, M., J. Chem. Phys. 7, 1103 (1939); 8, 2 (1940); J. Frenkel, J. Chem. Phys. 7, 538 (1939).
6Harris, S.J. and Martin, L. Robbin, J. Mater. Res. 5, 2313 (1990).
7Ascarelli, P., Molinari, E., Polini, R., Sessa, V., Terranova, M. L., Capelli, E., and Fontana, S., in Diamond and Diamond-like Films and Coating, edited by Angus, J. C., Clausing, R. E., Horton, L. L., and Koidl, P. (Plenum Press, New York, 1991), p. 729.
8Eto, H., Tamou, Y., Ohsawa, Y., and Kikuchi, N., Diamond and Related Materials 1, 373 (1992).
9Molinari, E., Polini, R., and Tomellini, M., Appl. Phys. Lett. 61, 1287 (1992).
10Iijima, S., Aikawa, Y., and Baba, K., J. Mater. Res. 6, 1491 (1991).
11Yarbrough, W.A., Applications of Diamond Films and Related Materials, edited by Tseng, V., Yoshikawa, M., Murakawa, M., and Feldman, A. (Elsevier, Amsterdam, 1991), p. 25.
12Molinari, E., Polini, R., and Tomellini, M., J. Mater. Res. 8, 798 (1993).
13Tomellini, M., in preparation.
14Polini, R., J. Appl. Phys. 72, 2517 (1992).
15Polini, R. and Molinari, E., unpublished research.

Diamond nucleation from the gas phase: A kinetic approach

  • E. Molinari (a1), R. Polini (a1), V. Sessa (a1), M.L. Terranova (a1) and M. Tomellini (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed