- Cited by 18
Zhao, Sheng-Sheng Du, Hao Zheng, Jing-Di Yang, Ying Wang, Wei Gong, Jun and Sun, Chao 2008. Deposition of thick TiAlN coatings on 2024 Al/SiCp substrate by Arc ion plating. Surface and Coatings Technology, Vol. 202, Issue. 21, p. 5170.
Zhao, Sheng-Sheng Yang, Ying Li, Jia-Bao Gong, Jun and Sun, Chao 2008. Effect of deposition processes on residual stress profiles along the thickness in (Ti,Al)N films. Surface and Coatings Technology, Vol. 202, Issue. 21, p. 5185.
Soroka, O. B. Klymenko, S. A. and Kopeikina, M. Yu. 2010. Evaluation of residual stresses in PVD-coatings. Part 2. Strength of Materials, Vol. 42, Issue. 4, p. 450.
Wan, X.S. Zhao, S.S. Yang, Y. Gong, J. and Sun, C. 2010. Effects of nitrogen pressure and pulse bias voltage on the properties of Cr–N coatings deposited by arc ion plating. Surface and Coatings Technology, Vol. 204, Issue. 11, p. 1800.
Soroka, O. B. 2010. Evaluation of residual stresses in PVD-coatings. Part 1. Review. Strength of Materials, Vol. 42, Issue. 3, p. 287.
Wang, Tie-Gang Zhao, Sheng-Sheng Hua, Wei-Gang Li, Jia-Bao Gong, Jun and Sun, Chao 2010. Estimation of residual stress and its effects on the mechanical properties of detonation gun sprayed WC–Co coatings. Materials Science and Engineering: A, Vol. 527, Issue. 3, p. 454.
Zhou, Y. Rao, G.B. Wang, J.Q. Zhang, B. Yu, Z.M. Ke, W. and Han, E.H. 2011. Influence of Ti/TiN bilayered and multilayered films on the axial fatigue performance of Ti46Al8Nb alloy. Thin Solid Films, Vol. 519, Issue. 7, p. 2207.
Yang, Ying Zhao, Shengsheng Gong, Jun Jiang, Xin and Sun, Chao 2011. Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films. Journal of Materials Science & Technology, Vol. 27, Issue. 5, p. 385.
Son, Jong-Ick Nam, Hee-Jong and Cho, Nam-Hee 2012. Nanostructural, Chemical, and Mechanical Features of nc-Si:H Films Prepared by PECVD. International Journal of Photoenergy, Vol. 2012, Issue. , p. 1.
Wang, Tie-Gang Liu, Yanmei Wang, Qimin Gong, Jun Sun, Chao and Kim, Kwang Ho 2012. Influence of residual stress on the adhesive behavior of detonation gun sprayed WC–Co coatings. Current Applied Physics, Vol. 12, Issue. , p. S59.
Cheng, Guo-an Han, Dong-yan Liang, Chang-lin Wu, Xiao-ling and Zheng, Rui-ting 2013. Influence of residual stress on mechanical properties of TiAlN thin films. Surface and Coatings Technology, Vol. 228, Issue. , p. S328.
Zhao, Sheng Sheng Lang, Wen Chang and Yan, Rong Ming 2013. Deposition of High Quality (Ti,Al)N Hard Coatings by Computer Automation Ion Plating. Applied Mechanics and Materials, Vol. 432, Issue. , p. 82.
Ji, J. Niu, Y. Wu, J. and Yu, Z. 2014. Improvement of properties of TiN coating by optimising microstructural design. Surface Engineering, Vol. 30, Issue. 1, p. 36.
Niu, Yunsong Wei, Jie and Yu, Zhiming 2015. Microstructure and tribological behavior of multilayered CrN coating by arc ion plating. Surface and Coatings Technology, Vol. 275, Issue. , p. 332.
Zhao, Sheng-Sheng Zhao, Yan-Hui Cheng, Lv-Sha Denisov, Vladimir Viktorovich Koval, Nikolay Nikolaevich Yu, Bao-Hai and Mei, Hai-Juan 2017. Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti–Cu–N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating. Acta Metallurgica Sinica (English Letters), Vol. 30, Issue. 2, p. 176.
Zhang, Wenlei Hirai, Yoshikazu Tsuchiya, Toshiyuki and Tabata, Osamu 2018. Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film. Applied Surface Science, Vol. 443, Issue. , p. 48.
Fan, Di Lei, Hao Guo, Chao-Qian Qi, Dong-Li Gong, Jun and Sun, Chao 2018. Stress Study on CrN Thin Films with Different Thicknesses on Stainless Steel. Acta Metallurgica Sinica (English Letters), Vol. 31, Issue. 3, p. 329.
Ding, Ji Cheng Wang, Qi Min Liu, Zhe Ren Jeong, Seonhee Zhang, Teng Fei and Kim, Kwang Ho 2019. Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique. Journal of Alloys and Compounds, Vol. 772, Issue. , p. 112.
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A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.
Hide All1Paldey, S.Deevi, S.C.: Single layer and multilayer wear resistant coatings of (Ti,Al)N: A review. Mater. Sci. Eng., A 342, 58 20032Peng, X.L.Clyne, T.W.: Mechanical stability of DLC films on metallic substrates: Part I—Film structure and residual stress levels. Thin Solid Films 312, 207 19983Haase, E.L.: The determination of lattice parameters and strains in stressed thin films using x-ray diffraction with Seeman–Bohlin focusing. Thin Solid Films 124, 283 19854Stoney, G.G. The tension of metallic films deposited by electrolysis.Proc. R. Soc. London Ser. A,82, 172 (1909)5Ma, C.H., Huang, J.H.Chen, H.: Residual stress measurement in textured thin film by grazing-incidence x-ray diffraction. Thin Solid Films 418, 73 20026Suh, C.M., Hwang, B.W.Kim, K.R.: Effect of ceramic coating thickness on residual stress and fatigue characteristic of 1Cr–1Mo–0.25V steel. Int. J. Mod. Phys. B 16(1–2), 181 20027Donohue, L.A., Lewis, D.B., Munz, W.D., Stack, M.M., Lyon, S.B., Wang, H.W.Rafaja, D.: The influence of low concentrations of chromium and yttrium on the oxidation behaviour, residual stress and corrosion performance of TiAlN hard coatings on steel substrates. Vacuum 55(2), 109 19998Zoestbergen, E., Carvalho, N.J.M.De Hosson, J.T.M.: Stress state or TiN/TiAlN PVD multilayers. Surf. Eng. 17(1), 29 20019Terner, M.R., Hedstrom, P., Almer, J., Ilavsky, J.Oden, M.: Residual stress evolution during decomposition of Ti(1−x)Al(x)N coatings using high-energy x-rays. Mater. Sci. Forum (Residual Stresses VII) 524–525, 619 200610Windischmann, H.Gray, K.J.: Stress measurement of CVD diamond films. Diamond Relat. Mater. 4, 837 199511Leusink, G.J., Oosterlaken, T.G.M., Janssen, G.C.A.M.Radelaar, S.: In situ sensitive measurement of stress in thin films. Rev. Sci. Instrum. 63, 3143 199212Malhotra, S.G., Rek, Z.U., Yalisove, S.M.Bilello, J.C.: Analysis of thin film stress measurement techniques. Thin Solid Films 301, 45 199713Genzel, Ch.Reimers, W.: A study of x-ray residual stress gradient analysis in thin layers with strong fibre texture. Phys. Status Solidi A 166, 751 199814Xu, W.H., Lu, D.Zhang, T.Y.: Determination of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films with Raman spectroscopy. Appl. Phys. Lett. 79, 4112 200215Rickerby, D.S., Jones, A.M.Bellamy, B.A.: Internal stress in titanium nitride coatings: Modelling of complex stress systems. Surf. Coat. Technol. 36, 661 198816Fillit, R.Y.Perry, A.J.: Residual stress and x-ray elastic constants in highly textured physically vapor deposited coatings. Surf. Coat. Technol. 36, 647 198817Danesh, P., Pantchev, B., Grambole, D.Schmidt, B.: Depth distributions of hydrogen and intrinsic stress in a-Si:H films prepared from hydrogen-diluted silane. J. Appl. Phys. 90, 3065 200118Jeelani, S., Biswas, S.Natarajan, R.: Effect of cutting speed and tool rake angle on residual stress distribution in machining 2024-T351 aluminium alloy—Unlubricated conditions. J. Mater. Sci. 21, 2705 198619Vlasveld, A.C., Harris, S.G., Doyle, E.D., Lewis, D.B.Munz, W.D.: Characterisation and performance of partially filtered arc TiAlN coatings. Surf. Coat. Technol. 149, 217 200220Hollstein, F., Wiedemann, R.Scholz, J.: Characteristics of PVD-coatings on AZ31hp magnesium alloys. Surf. Coat. Technol. 162, 261 2003
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