Skip to main content Accessibility help

The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis

  • Sheng-Sheng Zhao (a1), Hao Du (a1), Wei-Gang Hua (a1), Jun Gong (a1), Jia-Bao Li (a1) and Chao Sun (a1)...


A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.


Corresponding author

a)Address all correspondence to this author. e-mail:


Hide All
1Paldey, S.Deevi, S.C.: Single layer and multilayer wear resistant coatings of (Ti,Al)N: A review. Mater. Sci. Eng., A 342, 58 2003
2Peng, X.L.Clyne, T.W.: Mechanical stability of DLC films on metallic substrates: Part I—Film structure and residual stress levels. Thin Solid Films 312, 207 1998
3Haase, E.L.: The determination of lattice parameters and strains in stressed thin films using x-ray diffraction with Seeman–Bohlin focusing. Thin Solid Films 124, 283 1985
4Stoney, G.G. The tension of metallic films deposited by electrolysis.Proc. R. Soc. London Ser. A,82, 172 (1909)
5Ma, C.H., Huang, J.H.Chen, H.: Residual stress measurement in textured thin film by grazing-incidence x-ray diffraction. Thin Solid Films 418, 73 2002
6Suh, C.M., Hwang, B.W.Kim, K.R.: Effect of ceramic coating thickness on residual stress and fatigue characteristic of 1Cr–1Mo–0.25V steel. Int. J. Mod. Phys. B 16(1–2), 181 2002
7Donohue, L.A., Lewis, D.B., Munz, W.D., Stack, M.M., Lyon, S.B., Wang, H.W.Rafaja, D.: The influence of low concentrations of chromium and yttrium on the oxidation behaviour, residual stress and corrosion performance of TiAlN hard coatings on steel substrates. Vacuum 55(2), 109 1999
8Zoestbergen, E., Carvalho, N.J.M.De Hosson, J.T.M.: Stress state or TiN/TiAlN PVD multilayers. Surf. Eng. 17(1), 29 2001
9Terner, M.R., Hedstrom, P., Almer, J., Ilavsky, J.Oden, M.: Residual stress evolution during decomposition of Ti(1−x)Al(x)N coatings using high-energy x-rays. Mater. Sci. Forum (Residual Stresses VII) 524–525, 619 2006
10Windischmann, H.Gray, K.J.: Stress measurement of CVD diamond films. Diamond Relat. Mater. 4, 837 1995
11Leusink, G.J., Oosterlaken, T.G.M., Janssen, G.C.A.M.Radelaar, S.: In situ sensitive measurement of stress in thin films. Rev. Sci. Instrum. 63, 3143 1992
12Malhotra, S.G., Rek, Z.U., Yalisove, S.M.Bilello, J.C.: Analysis of thin film stress measurement techniques. Thin Solid Films 301, 45 1997
13Genzel, Ch.Reimers, W.: A study of x-ray residual stress gradient analysis in thin layers with strong fibre texture. Phys. Status Solidi A 166, 751 1998
14Xu, W.H., Lu, D.Zhang, T.Y.: Determination of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films with Raman spectroscopy. Appl. Phys. Lett. 79, 4112 2002
15Rickerby, D.S., Jones, A.M.Bellamy, B.A.: Internal stress in titanium nitride coatings: Modelling of complex stress systems. Surf. Coat. Technol. 36, 661 1988
16Fillit, R.Y.Perry, A.J.: Residual stress and x-ray elastic constants in highly textured physically vapor deposited coatings. Surf. Coat. Technol. 36, 647 1988
17Danesh, P., Pantchev, B., Grambole, D.Schmidt, B.: Depth distributions of hydrogen and intrinsic stress in a-Si:H films prepared from hydrogen-diluted silane. J. Appl. Phys. 90, 3065 2001
18Jeelani, S., Biswas, S.Natarajan, R.: Effect of cutting speed and tool rake angle on residual stress distribution in machining 2024-T351 aluminium alloy—Unlubricated conditions. J. Mater. Sci. 21, 2705 1986
19Vlasveld, A.C., Harris, S.G., Doyle, E.D., Lewis, D.B.Munz, W.D.: Characterisation and performance of partially filtered arc TiAlN coatings. Surf. Coat. Technol. 149, 217 2002
20Hollstein, F., Wiedemann, R.Scholz, J.: Characteristics of PVD-coatings on AZ31hp magnesium alloys. Surf. Coat. Technol. 162, 261 2003



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed