Skip to main content Accessibility help
×
Home

Dependence of the properties of laser deposited tin oxide films on process variables

  • V. P. Godbole (a1), R. D. Vispute (a1), S. M. Chaudhari (a1), S. M. Kanetkar (a1) and S. B. Ogale (a1)...

Abstract

In this paper we report the influence of process variables, viz., substrate temperature, oxygen partial pressure, and external electric field bias, on phase precipitation and microstructure of tin oxide films as revealed by small-angle x-ray diffraction and conversion electron Mössbauer spectroscopy.

Copyright

References

Hide All
1Wu, X. D., Dijjkkamp, D., Ogale, S. B., Inam, A., Chase, E.W., Miceli, P. F., Chang, C., Tarascon, J. M., and Venkatesan, T., Appl. Phys.Lett. 51, L1487 (1987).
2Rothenberg, J. E. and Kelly, R., Nuclear Instruments and Methods in Physics Research B1, 291 (1984).
3Vispute, R.D., Godbole, V. P., Chaudhari, S.M., Kanetkar, S.M., and Ogale, S. B., J. Mater. Res. 3 (6), 1180 (1988).
4Ogale, S.B., Koinkar, V.N., Joshi, S., Godbole, V.P., Date, S.K., Mitra, A., Venkatesan, T., and Wu, X. D., Appl. Phys. Lett. 53 (14), 1320 (1988).
5Joshi, S., Nawathey, R., Koinkar, V.N., Godbole, V.P., Chaudhari, S.M., Ogale, S. B., and Date, S. K., J. Appl. Phys. 64 (10), 5647 (1988).
6Dixit, S. J., Godbole, V. P., Chaudhari, S. M., Kanetkar, S. M., and Ogale, S. B., Appl. Phys. Lett. 54 (8), 775 (1989).
7Hanabusa, M., Mater. Sci. Rep. 2, 51 (1987).
8Witanachchi, S., Kwok, H. S., Wang, X.W., and Shaw, D.T., Appl.Phys. Lett. 53 (3), 234 (1988).
9 Mosfit program was originally written by Kreber, E. from Université des Saarlandes, Saarbrücken, and it was adopted from the ICL 1904s computer by Date, S. K., National Chemical Laboratory, Pune, India.
10Stockier, H. A., Sona, H., and Herber, R. H., J. Chem. Phys. 45, 1182 (1966).
11Mitrofanov, K. P., Plotnikova, M.V., and Shipinel, V. S., Sov. Phys.JETP 21, 524 (1965).
12Greenwood, N. N. and Gibb, T. C., Mössbauer Spectroscopy (Chap-man and Hall, London, 1971).
13Korecki, J., Krop, K., and Toll, K., Thin Solid Films 59,147 (1979).
14Manifacier, J. C., de Murcia, M., Fillard, J. P., and Vircario, E., Thin Solid Films 41, 127 (1977).

Dependence of the properties of laser deposited tin oxide films on process variables

  • V. P. Godbole (a1), R. D. Vispute (a1), S. M. Chaudhari (a1), S. M. Kanetkar (a1) and S. B. Ogale (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed