Hostname: page-component-76fb5796d-qxdb6 Total loading time: 0 Render date: 2024-04-27T03:54:10.997Z Has data issue: false hasContentIssue false

Brazing of aluminum nitride substrates

Published online by Cambridge University Press:  31 January 2011

M. Grant Norton
Affiliation:
Department of Materials, Imperial College of Science, Technology and Medicine, Prince Consort Road, London SW72BP, England
Jacek M. Kajda
Affiliation:
Department of Materials, Imperial College of Science, Technology and Medicine, Prince Consort Road, London SW72BP, England
Brian C.H. Steele
Affiliation:
Department of Materials, Imperial College of Science, Technology and Medicine, Prince Consort Road, London SW72BP, England
Get access

Abstract

Aluminum nitride (AlN) is currently under investigation as a potential candidate for replacing aluminum oxide (Al2O3) as a substrate material for electronic circuit packaging. The requirements for such a material are that it can be metallized and joined to produce hermetic enclosures for semiconductor devices. A technique for brazing AlN using a nonactive metal braze has been investigated. The process involves the in situ decomposition of an active metal hydride. This process improves the wetting of the AlN and led to the development of strong bonding between braze and ceramic. The ceramic-braze interface was studied using scanning electron microscopy (SEM). The nature of the interfacial reactions and the reaction products have been identified using x-ray diffraction (XRD). The progress of the reaction has been followed using differential thermal analysis (DTA). The experimental results have been correlated with thermodynamic predictions of the reaction processes. In addition to joining ceramic to ceramic, braze joints of AlN to copper and to a low expansion iron-nickel lead frame alloy were made. Residual stress resulting from a mismatch of thermal expansion coefficients between AlN and copper caused cracking in the ceramic upon cooldown from the brazing temperature. No cracking occurred in the ceramic when joined to the iron-nickel alloy. The results obtained are important for the realization of AlN as a ceramic packaging material for semiconductor devices.

Type
Articles
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Nicholas, M. G. and Mortimer, D. A., Mater. Sci. and Tech. 1, 657 (1985).CrossRefGoogle Scholar
2Nicholas, M. G., Brit. Ceram. Trans. J. 85, 144 (1986).Google Scholar
3Chase, M. W., J. Phys. Chem. Ref. Data 4, 1 (1975).CrossRefGoogle Scholar
4Yu. Naidich, Prog. Surf. Membrane Sci. 14, 353 (1981).CrossRefGoogle Scholar
5Naka, M., Tanaka, T., Okamoto, I., and Arata, Y., Trans. JWRI12, 337 (1983).Google Scholar
6Mizuhara, H. and Mally, K., Weld. J. 64, 27 (1985).Google Scholar
7Santella, M. L., Adv. Ceram. Mater. 3, 457 (1988).CrossRefGoogle Scholar
8Brow, R. K., Loehman, R. E., Tomsia, A. P., and Pask, J. A., Adv. Ceram. 26, 189 (1989).Google Scholar
9Dettmer, E. S. and Charles, H. K., Int. J. Hybrid Microelectron. 10, 9 (1987).Google Scholar
10 Powder Diffraction File, International Center for Diffraction, Swarthmore, PA.Google Scholar
11Kubaschewski, O. and Evans, E. L., Metallurgical Thermochemistry, 3rd ed. (Pergamon Press, New York, 1958).Google Scholar
12Beyers, R., Sinclair, R., and Thomas, M. E., J. Vac. Sci. Technol. B2, 781 (1984).CrossRefGoogle Scholar
13Westwood, A. D. and Notis, M. R., Adv. Ceram. 26, 171 (1989)Google Scholar