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Amorphous silicon nitride fibers grown from the vapor phase

Published online by Cambridge University Press:  03 March 2011

Frederick T. Wallenberger  and
Paul C. Nordine
Frederick T. Wallenberger
Affiliation:
Department of Materials Science and Engineering, University of Illinois, 1304 West Green Street, Urbana, Illinois 61801
Paul C. Nordine
Affiliation:
Containerless Research, Incorporated, 735 Carriage Way, Deerfield, Illinois 60015
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Abstract

Using high reactor pressures (>1 bar) and a unique rate control mechanism, three fibers were recently obtained by laser assisted chemical vapor deposition (LCVD) having elemental (i.e., boron, carbon, and silicon) compositions, small diameters (>9 μm), and surprisingly high growth rates (0.3–1.1 mm/s). By reacting silane and ammonia at high pressures (>1 bar) near the focus of a Nd-YAG laser beam, we have now obtained the first LCVD fibers with binary (i.e., silicon-nitrogen and silicon nitride) compositions having small diameters and high growth rates (0.34–0.74 mm/s). These fibers were amorphous.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 9 , Issue 3 , March 1994 , pp. 527 - 530
Copyright
Copyright © Materials Research Society 1994

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References

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