Skip to main content Accessibility help
×
Home

Aligned Diamond Nanowhiskers

  • Eun-Song Baik (a1), Young-Joon Baik (a1) and Dongryul Jeon (a2)

Abstract

We investigated the formation of nanowhiskers by means of air plasma dry etching using diamond films of two different kinds: as-grown diamond films and films with molybdenum (Mo) deposits. As for the as-grown diamond films, nanowhiskers were found to form preferentially at grain boundaries of diamond crystals. Auger depth profile analysis of the etched films revealed a progressive enrichment by Mo toward the whisker tip, resulting from accidental sputtering of Mo substrate holder. With dry etching of diamond films with preformed Mo deposits, well-aligned whiskers 100 nm in diameter were found to form uniformly over the entire film surface with a population density of 30/μm2. From these findings, it follows that Mo deposits serve as micromasks for the formation of the nanowhiskers. It was also confirmed that these whiskers showed excellent field-emission behavior.

Copyright

Corresponding author

a)Address all correspondence to this author. e-mail: yjbaik@kistmail.kist.re.kr

References

Hide All
1.Geis, M.W., Twichell, J.C., Macaulay, J., and Okano, K., Appl. Phys. Lett. 67, 1328 (1995).
2.Cutler, P.H., Huang, Z-H., Miskovsky, N.M., D'Ambrosio, P., and Chung, M., J. Vac. Sci. Technol. B 14, 2020 (1996).
3.Wang, C., Garcia, A., Ingram, D.C., Lake, M., and Kordesh, M.E., Electron. Lett. 27, 1459 (1991).
4.Zhu, W., Kochanski, G.P., and Jin, S., Science 282, 1471 (1998).
5.Xu, N.S., Latham, R.V., and Tzeng, Y., Electron. Lett. 29, 1596 (1993).
6.Asano, T., Oobuchi, Y., and Katsumata, S., Technical Digest of 7th International Vacuum Microelectronics Conference, Grenoble, France, July 4–7, 1994, p. 100.
7.Okano, K., Hoshina, K., Koizumi, S., and Itoh, J., IEEE Electron Device Lett. 16(6), 239 (1995).
8.Baik, E-S., Jeon, D., and Baik, Y-J., Diamond Relat. Mater. 8, 89 (1999).
9.Baik, E-S., Jeon, D., and Baik, Y-J., Diamond Relat. Mater. 8, 2169 (1999).
10.Ren, Z.F., Huang, Z.P., Xu, J.W., Wang, J.H., Bush, P., Siegal, M.P., and Provencio, P.N., Science 282, 1105 (1998).
11.Ohring, M., The Materials Science of Thin Films (Academic Press, San Diego, CA, 1993), p. 195.
12.Stoner, B.R., Tessmer, G.J., and Dreifus, D.L., Appl. Phys. Lett. 62, 1803 (1993).
13.Jansen, H., Gardeniers, H., de Boer, M., Elwenspoek, M., and Fluitman, J., J. Micromech. Microeng. 6, 14 (1996).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed