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Aerosol synthesis of AlN by nitridation of aluminum vapor and clusters

Published online by Cambridge University Press:  03 March 2011

Sotiris E. Pratsinis ,
Guizhi Wang ,
Siddhartha Panda ,
Theresa Guiton  and
Alan W. Weimer
Sotiris E. Pratsinis*
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Guizhi Wang
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Siddhartha Panda
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Theresa Guiton
Affiliation:
Advanced Ceramics Laboratory, The Dow Chemical Co., 1776 Building, Midland, Michigan 48674
Alan W. Weimer
Affiliation:
Advanced Ceramics Laboratory, The Dow Chemical Co., 1776 Building, Midland, Michigan 48674
*
a)Author to whom correspondence should be addressed.
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Abstract

Aluminum nitride (AlN) powders were produced in an aerosol flow reactor by direct nitridation of aluminum vapor with ammonia and nitrogen in flowing argon. In the presence of excess NH3, pure AlN powders were obtained from 1400 to 1873 K. These powders had higher specific surface areas than commercially available AlN powders. The effects of reactor temperature and gas flow rate on AlN purity, yield, and grain and crystallite size were investigated. The BET grain diameter of AlN increased as the process temperature increased, indicating sintering controlled particle formation and growth. Both the crystallite size and the BET grain size of pure AlN powders slightly decreased as ammonia flow rate was increased. Increasing temperature and flow rate increased the AlN yield.

Type
Environmentally Benign Materials and Processes
Information
Journal of Materials Research , Volume 10 , Issue 3 , March 1995 , pp. 512 - 520
Copyright
Copyright © Materials Research Society 1995

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