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A study of piezoelectric orthorhombic Ta2O5

Published online by Cambridge University Press:  31 January 2011

B. R. Jooste  and
H. J. Viljoen
B. R. Jooste
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126
H. J. Viljoen
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126
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Extract

In 1985 it was first reported that monoclinic Ta2O5 has piezoelectric properties comparable to ZnO. In this work we report on the deposition, characterization, and qualitative assessment of the piezoelectric behavior of orthorhombic Ta2O5. Reactive magnetron sputtering was used to deposit thin films of Ta2O5 onto substrates of 316L stainless steel. Without substrate heating the crystallinity was poor. A rapid thermal anneal improved the crystallinity. The orthorhombic phase was dominantly present on all substrates. The piezoelectric property was qualitatively assessed, including a high temperature test at 650 °C.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 2 , February 1998 , pp. 475 - 482
Copyright
Copyright © Materials Research Society 1998

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