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Preparation and characterization of laser-ablated multicomponent chalcogenide thin films

Published online by Cambridge University Press:  31 January 2011

Didarul Islam
Affiliation:
Department of Physics and Astronomy, Condensed Matter and Surface Sciences Program, Ohio University, Athens, Ohio 45701
C. E. Brient
Affiliation:
Department of Physics and Astronomy, Condensed Matter and Surface Sciences Program, Ohio University, Athens, Ohio 45701
R. L. Cappelletti
Affiliation:
Department of Physics and Astronomy, Condensed Matter and Surface Sciences Program, Ohio University, Athens, Ohio 45701
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Abstract

The preparation of multicomponent chalcogenide glassy thin films from bulk targets by laser ablation is described. The film stoichiometries are characterized by proton-induced x-ray emission (PIXE). Compared to single source thermal evaporation, laser ablation is found to preserve starting stoichiometries in the resulting thin films far more accurately. Thermally evaporated films were studied both by PIXE and by energy dispersed x rays (EDX) produced in a scanning electron microscope, and the results of these two analytical techniques compare well.

Type
Articles
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1Sankur, H., in Laser Controlled Chemical Processing of Surfaces, edited by Johnson, A.W., Ehrlich, D. J., and Schlossberg, H.R. (North-Holland, New York, 1984), p. 373.Google Scholar
2Islam, D. and Cappelletti, R. L., Bulletin of the American Physical Society 33, 783 (1988); Islam, D., Wang, Hong-Juan, and Cappelletti, R. L., unpublished research.Google Scholar
3Zheng, J. P., Huang, Z. Q., Shaw, D.T., and Kwok, H. S., Appl. Phys. Lett. 54, 280 (1989).CrossRefGoogle Scholar
4Johansson, S. A. E. and Johansson, T. B., Nucl. Inst. Meth. 137, 473 (1976).CrossRefGoogle Scholar
5 The instrument was a Princeton Gammatech EDX System. A Standardless Quantitative Analysis Program (originally from the NIST) which corrects for atomic number, absorption, and fluorescence was used for the analysis.Google Scholar