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Determination of elastic modulus of thin films and small specimens using beam bending methods

Published online by Cambridge University Press:  31 January 2011

J. Menčík  and
E. Quandt
J. Menčík
Affiliation:
Forschungszentrum Karlsruhe, Institute of Materials Research, D-76021 Karlsruhe, Germany
E. Quandt
Affiliation:
Forschungszentrum Karlsruhe, Institute of Materials Research, D-76021 Karlsruhe, Germany
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Abstract

Elastic modulus of small specimens and thin films can be determined in bending tests using cantilever or three-point arrangement. The paper presents the basic formulae for these measurements, analyzes the errors which can arise, and shows how they can be reduced. The use of the method is illustrated on glass, silicon, and glass coated with TbDyFe.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 5 , May 1999 , pp. 2152 - 2161
Copyright
Copyright © Materials Research Society 1999

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References

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