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A Jeolco 200A Cartridge with Specimen Heating, Tilting, and Power Provisions

Published online by Cambridge University Press:  18 June 2020

R. M. Anderson
Affiliation:
IBM System Products Division, Hopewell Junction, NY12533
J. K. Howard
Affiliation:
IBM System Products Division, Hopewell Junction, NY12533
P. Fullam
Affiliation:
E. F. Fullam, Inc., Schenectady, NY12301
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Extract

The transmission electron microscopic study of thin metal film interconnections on electronic integrated circuits requires a sophisticated in-situ capability. Electromigration, particularly, cannot be investigated solely by viewing static heat-treated or electrically stressed specimens ex-situ. The key to the early electromigration studies by Blech, and others, was the in-situ observation of material movement in anelectrical-powering-stage equipped TEM. Blech's approach was insensitive to structure effects because of an absence of heating capability; he therefore relied on joule heating and temperature gradient effects.

Type
Instrumentation
Copyright
Copyright © Claitor’s Publishing Division 1975

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