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Experience and results obtained at the ESRF with high-precision air bearing motion systems

Published online by Cambridge University Press:  14 January 2011

P. Marion*
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
L. Ducotte
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
M. Nicola
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
H. P. van der Kleij
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
L. Eybert
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
E. Gagliardini
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
Y. Dabin
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
P. Bernard
Affiliation:
ESRF, B.P. 220, F-38043 Grenoble Cedex, France
*
Email address for correspondence:marion@esrf.fr
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Abstract

In high-accuracy motion stages, the positioning accuracy at the point of interest is strongly influenced by guiding errors: for translation motions, straightness errors and angular errors (pitch, yaw and roll); for rotation motions, axial, radial and tilt errors. When air bearings are used for guiding, the air film averages out local irregularities of bearings surfaces, which helps reduce guiding errors considerably. Some results obtained with air bearing precision systems designed and manufactured by specialized companies and tested at ESRF are described below.

Type
Contributed paper
Copyright
Copyright © Diamond Light Source Ltd 2011

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References

REFERENCES

Slocum, A. H. 1992 Precision Machine Design, Society of Manufacturing Engineers. ISBN 0-13-690918-3.Google Scholar
Nicola, M., van der Kleij, H. P. 2010 Measurement and characterisation of precision rotary axes at the ESRF, MEDSI.CrossRefGoogle Scholar