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Study of Thin Films and Multilayers using Energy-Dispersive Diffraction of Synchrotron Radiation

Published online by Cambridge University Press:  06 March 2019

R. J. Cernik ,
S. M. Clark  and
P. Pattison
R. J. Cernik
Affiliation:
Daresbury Laboratory Warrington WA44AD England
S. M. Clark
Affiliation:
Daresbury Laboratory Warrington WA44AD England
P. Pattison
Affiliation:
Daresbury Laboratory Warrington WA44AD England
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Abstract

We present the results of a preliminary study of the use of polychromatic synchrotron radiation in energy-dispersive mode for the rapid characterization of thin film and multilayer materials. This technique takes advantage of the high intensity and excellent collimation properties of white beam synchrotron radiation. The glancing angle diffraction geometry allows structural depth probing as well as enhanced signal-to-noise by suppressing substrate contributions. The technique was successfully applied to metallic films a few hundred Angstroms thick, and to W-C multilayers.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 101 - 107
Copyright
Copyright © International Centre for Diffraction Data 1989

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References

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