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Quantitative Microprobe Analysis by Means of Target Current Measurements*

Published online by Cambridge University Press:  06 March 2019

J. W. Colby ,
W. N. Wise  and
D. K. Conley
J. W. Colby
Affiliation:
National Lead Co. of Ohio Cincinnati, Ohio
W. N. Wise
Affiliation:
National Lead Co. of Ohio Cincinnati, Ohio
D. K. Conley
Affiliation:
General Electric Co., NMPO Cincinnati, Ohio
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Abstract

In the microprobe analyzer, a portion of the high energy electrons impinging on the surface are backscattered from the sample and re-emitted at high energy levels. Low energy (less than 50 eV) or secondary electrons also ate emitted. Both the electron backscatter yield and the secondary electron yield are related to the mean atomic number of the target material and, hence, may be used to provide information about the target composition. Unfortunately, however, the secondary electron yield is very sensitive to the surface condition of the specimen and various instrument parameters. This complicates the otherwise simple linear relationship between sample composition and electron backscatter yield.

It is shown that the effects due to secondary electrons can be minimized by biasing the sample, and that good results can be obtained in the analysis of binary systems. The limitations and utility of the method are discussed, and backscatter yields are determined.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 10: Fifteenth Annual Conference on Applications of X-ray Analysis, August 10-12, 1966 , 1966 , pp. 447 - 461
Copyright
Copyright © International Centre for Diffraction Data 1966

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Footnotes

*

Present address: Bell Telephone Laboratories, Inc., Allentown, Pennsylvania.

*

The work reported herein was performed for the U.S. Atomic Energy Commission under contract AT(30-1)-115.6.

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