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Least-Squares Refinement of X-ray Reflectivity Data Obtained with a Conventional Powder Diffractometer

  • R. Gilles (a1), G. Will (a1), F. Elf (a1) and T. C. Huang (a2)

Abstract

Results on least-squares refinement of X-ray reflectivity data obtained with a conventional powder diffractometer are reported. A model containing an oxygen contaminated surface on Pt was used to refine experimental data for a “500-Å” Pt film on Si. Values of layer thickness, density, and roughness determined by least-squares refinement agree with those obtained from highresolution reflectivity data. The results were found to be insensitive to the film-surface alignment. An agreement of ±2.3 Å for Pt thickness, 8% for density, and 2.5 Å for roughness was obtained when the surface was aligned to within the divergence of the incident X-ray beam. The least-squares refinement method was also used to analyze two sputtered “300-Å” Pt films deposited at 4 and 20 × 10-6 Torr Ar pressure. Results showed a significant increase in Pt thickness and a decrease in density for the 20 × 10-6 film probably caused by a large amount of Ar trapped in the film.

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1. Huang, T. C., Gilles, R. and Will, G., Adv. X-ray Anal. 37, 183188 (1994).
2. Huang, T. C., Gilles, R. and Will, G., Thin Solid Films 230, 99101 (1993).
3. Parrish, W., Erickson, C., Huang, T.C., Hart, M., Gilles, B. and Toraya, H., Mat. Res. Soc. Symp. Proc. 208, 327-337 (1991).
4. Lengeler, B., Festkorperprobleme 29, 6473 (1989).
5. Huang, T. C., Toraya, H., Blanton, T. and Wu, Y., J. Appl. Cryst. 26, 180184 (1993).
6. Blanton, T., Huang, T.C., Toraya, H., Hubbard, C., Robie, S., Gobel, D. H., Will, G., Gilles, R. and Raftery, T., accepted for publication in Powder Diffraction (1994).
7. Huang, T. C. and Parrish, W., Adv. X-Ray Anal. 35, 137142 (1992).

Least-Squares Refinement of X-ray Reflectivity Data Obtained with a Conventional Powder Diffractometer

  • R. Gilles (a1), G. Will (a1), F. Elf (a1) and T. C. Huang (a2)

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