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Grazing Incidence X-ray Fluorescence Analysis with Monochromatic Radiation

Published online by Cambridge University Press:  06 March 2019

Manfred Schuster
Manfred Schuster*
Affiliation:
Siemens AG Corporate Research and Development, ZFE ME AMF 12 Otto-Hahn-Ring 6, D-8000 Munich 83, West Germany
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Abstract

X-ray fluorescence excited by a monochromatic collimated Mo-Kα beam at grazing incidence is measured as a function of the angle of incidence. Monochromatic excitation guarantees a well-defined penetration depth and enables a simple analytical description of the fluorescence intensity. This method is applied to a system of thin Cu and Ti metallization layers on a Si wafer and to As dopant concentration profiles in Si wafers.Thereby, the effect of annealing can be analyzed non-destructively.

Type
II. Determination of Low Concentration Levels by X-Ray Spectrometry
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 71 - 80
Copyright
Copyright © International Centre for Diffraction Data 1990

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