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Energy Dispersive Grazing Incidence X-ray Diffraction Study on Organic Thin Films EpitaxiaHy Grown on Crystalline Substrate

Published online by Cambridge University Press:  06 March 2019

Kenji Ishida ,
Akinori Kita ,
Kouichi Hayashi ,
Toshihisa Horiuchi ,
Shoichi Kal  and
Kazumi Matsushige
Kenji Ishida
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
Akinori Kita
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
Kouichi Hayashi
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
Toshihisa Horiuchi
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
Shoichi Kal
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
Kazumi Matsushige
Affiliation:
Department of Electronic Science and Engineering, Faculty of Engineering, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 606-01, Japan
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Extract

Thin film technology is rapidly evolving today, and the characterization of the thin film and its surface have become very important issue not only from scientific but also technological viewpoints. Although x-ray diffraction measurements have been used as suitable evaluation methods in crystallography studies, its application to the structural evaluation of the thin films, especially organic one having the low electron densities, is not easy due to the small amounts of scattering volume and the high obstructive scattering noise from the substrate. However, the x-ray diffraction measurements under grazing incidence will aid not only in overcoming the such problems but also in analyzing in-plane structure of the thin films. Therefore, so-called grazing incidence x-ray diffraction (GIXD) has been recognized as one of the most powerful tools for the surface and thin film studies.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 39: Forty-Fourth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1995 , 1995 , pp. 659 - 664
Copyright
Copyright © International Centre for Diffraction Data 1995

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