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Appllied Crystallography in the Scanning Electron Microscope Using a CCD Detector*

Published online by Cambridge University Press:  06 March 2019

R.R. Goehner  and
J.R. Michael
R.R. Goehner
Affiliation:
Materials and Process Sciences Center Sandia National Laboratories Albuquerque, NM 87185-0342
J.R. Michael
Affiliation:
Materials and Process Sciences Center Sandia National Laboratories Albuquerque, NM 87185-0342
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Abstract

The development of a new charge coupled device (CCD)-based detector for the scanning electron microscope (SEM) has allowed high quality backscattered electron Kikuchi patterns (BEKP) suitable for crystallographic analysis to be collected. These BEKPs can be used for crystallographic texture, phase and microstress analysis. This CCD detector system, can also be equipped with a special filter for removing backscattered electrons, which allows us to image low intensity, highly divergent x-ray diffraction (Kossel) patterns. The Kossel patterns are utilized for the accurate measurement of d-spacings suitable foe residual stress and lattice parameter measurements.

Type
VII. Microbeam XRD and XRS Analysis
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 539 - 545
Copyright
Copyright © International Centre for Diffraction Data 1994

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Footnotes

*

This work was performed at Sandia National Laboratories, which is operated for the U.S. Department of Energy under contract number DE-AC04-94AL85000.

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