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Advances in Low-Energy Electron-Induced X-Ray Spectroscopy (LEEIXS)

Published online by Cambridge University Press:  06 March 2019

René Bador ,
Maurice Romand ,
Marlène Charbonnier  and
Alain Roche
René Bador
Affiliation:
Biophysics Laboratory-Pharmaceutical Sciences Unit, Université Claude Bernard - Lyon I, 69008 Lyon, France
Maurice Romand
Affiliation:
Applied Chemistry Department (C.N.R.S., ERA n° 300), Universite Claude Bernard - Lyon I, 69622 Villeurbanne Cedex, France
Marlène Charbonnier
Affiliation:
Applied Chemistry Department (C.N.R.S., ERA n° 300), Universite Claude Bernard - Lyon I, 69622 Villeurbanne Cedex, France
Alain Roche
Affiliation:
Applied Chemistry Department (C.N.R.S., ERA n° 300), Universite Claude Bernard - Lyon I, 69622 Villeurbanne Cedex, France
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Abstract

Using low-energy electron induced X-ray spectroscopy (LEEIXS) with a cold cathode tube as excitation source and appropriate calibrations, quantitative surface composition informations are obtained. The results concern anodic film thicknesses and carbon impurities, In addition, qualitative informations on the chemical state of the film components are deduced from the fine structure of X-ray emission bands. The results concern oxygen K emission spectra from CuO and Cu2O, SnO, SnO2 and anodized Sn. It is also shown the capabilities of LEEIXS for gaining element-depth profiles, One example pertaining to phosphorus impurities in Al2O3 anodic films is given. Finally advantages and disadvantages of LEEIXS over ion-induced X-ray spectroscopy are discussed.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 24: Twenty-Ninth Annual Conference on Applications of X-ray Analysis, August 4-8, 1980 , 1980 , pp. 351 - 361
Copyright
Copyright © International Centre for Diffraction Data 1980

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References

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