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Diffraction Space Mapping of Heteroepitaxial Layers

Published online by Cambridge University Press:  06 March 2019

Mary Halliwell
Mary Halliwell*
Affiliation:
Philips Analytical X-ray, Almelo The Netherlands
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Abstract

The acceptance angle of the detector of a double axis diffractometer is designed such that all of the diffracted beam is recorded for a rocking curve. When this acceptance angle is reduced, as in the triple axis diffractometer, two dimensional diffraction data can be recorded. In the resulting diffraction space maps each diffraction feature has a shape and a position from which the unit cell dimensions of a heteroepitaxial layer can be derived as well as information about relative tilts, curvature, lattice parameter variations and defect densities. Applications of diffraction space mapping using high and low resolution optics are discussed

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 151 - 164
Copyright
Copyright © International Centre for Diffraction Data 1994

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