2 results
On-chip tensile testing of nanoscale silicon free-standing beams
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- Journal:
- Journal of Materials Research / Volume 27 / Issue 3 / 14 February 2012
- Published online by Cambridge University Press:
- 04 November 2011, pp. 571-579
- Print publication:
- 14 February 2012
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Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems
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- Journal:
- Journal of Materials Research / Volume 26 / Issue 10 / 28 May 2011
- Published online by Cambridge University Press:
- 19 May 2011, pp. 1279-1284
- Print publication:
- 28 May 2011
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