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Large Area and Depth-Profiling Dislocation Imaging and Strain Analysis in Si/SiGe/Si Heterostructures
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue 5 / October 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 1521-1527
- Print publication:
- October 2014
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- Article
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