We have discovered a novel chemisorption method using octadecyltrimethoxysilane (ODMS), titanium tetraisopropoxide (TTIP), water, and toluene [1] to form highly-ordered self-assembled monolayers (SAM) of ODMS. The SAMs were formed rapidly from the active solution even when it was kept for three months. The solution and layers were characterized by several methods. We propose a mechanism for the rapid formation of the ODMS-SAM.