The dielectric functions ε = ε1+iε2 of AlAs were determined from 1.5 eV to 5.0 eV, by spectroscopie ellipsometry (SE), from room temperature (RT) to ∼577 °C in an ultrahigh vacuum (UHV) chamber. Molecular beam epitaxy (MBE)-grown AlAs was covered by a thin GaAs layer, which was passivated by arsenic capping to prevent oxidation. The arsenic cap was desorbed inside the UHV chamber. SE measurements of the unoxidized sample were made, at various temperatures. Temperature dependent optical constants of AlAs were obtained by mathematically removing the effects of the GaAs cap and substrate. Quantitative analyses of the variations of critical-point energies with temperature, by using the harmonic oscillator approximation (HOA), indicate that the E1 and E1+Δ1 energies decrease -350 meV as temperature increases from RT to 500 °C.