7 results
Evaluation of Copper Oxide to Copper Selectivity of Chemical Systems for BEOL Cleaning Through Electrochemical Investigations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B08-25
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- 2007
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Evaluation of Inhibitors for ECMP of Copper Using Electrochemical Quartz Crystal Microbalance (EQCM) Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-09
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- 2006
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Applications of Raman Spectroscopy in Cu CMP: In-situ Detection of Chemical Species in the Slurry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-02
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- 2006
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Etching of Zirconium Oxide, Hafnium Oxide, and Hafnium Silicates in Dilute Hydrofluoric Acid Solutions
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- Journal:
- Journal of Materials Research / Volume 19 / Issue 4 / April 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1149-1156
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- April 2004
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Interaction Between Ceria and Hydroxylamine
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F3.3
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- 2003
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Post-CMP Cleaning of W and SiO2: A Model Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 109
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- 1995
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Electrochemical Aspects of Etching and Passivation of Silicon in Alkaline Solutions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 63
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- 1995
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