2 results
High Yield Polymer MEMS Process for CMOS/MEMS Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s04-12
- Print publication:
- 2011
-
- Article
- Export citation
SU8 / modified MWNT composite for piezoresistive sensor application
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s04-11
- Print publication:
- 2011
-
- Article
- Export citation