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SU8 / modified MWNT composite for piezoresistive sensor application

Published online by Cambridge University Press:  20 January 2011

Prasenjit Ray ,
V. Seena ,
Rupesh A. Khare ,
Arup R. Bhattacharyya ,
Prakash R. Apte  and
Ramgopal Rao
Prasenjit Ray
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
V. Seena
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Rupesh A. Khare
Affiliation:
Department of Metallurgical Engineering & Materials Science, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Arup R. Bhattacharyya
Affiliation:
Department of Metallurgical Engineering & Materials Science, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Prakash R. Apte
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Ramgopal Rao
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
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Abstract

SU-8 is being increasingly used as a compliant structural material for MEMS applications due to its interesting properties such as lower Young’s modulus and higher mechanical and thermal stability. One of the popular classes of MEMS devices is a piezoresitive microcantilever. Ultra-sensitive polymer composite cantilevers made up of SU-8 as a structural layer and 10% carbon Black in SU8 as a piezoresistive layer with lower Young’s modulus and higher gauge factor have been reported recently by our group. Higher electrical conductivity at lower concentration of conductive filler is of increased interest. Here we report a novel composite with purified multiwall carbon nanotubes (MWNT) in SU8 as a piezoresistor. MWNT were modified with octadecyl triphenyl phosphonium bromide (OTPB) in order to achieve debundled MWNT. A microcantilever device with integrated MWNT/SU-8 composite has been fabricated and characterized.

Keywords

compositepolymermicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s04-11
Copyright
Copyright © Materials Research Society 2011

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