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New Wet Cleaning Strategies for Obtaining Highly Reliable thin Oxides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 35
- Print publication:
- 1993
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- Article
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HF-last cleanings : a study of the properties with respect to the different variables
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 457
- Print publication:
- 1993
-
- Article
- Export citation