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Properties of Al2O3 films prepared by argon ion assisted deposition
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- Journal:
- Journal of Materials Research / Volume 9 / Issue 10 / October 1994
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2688-2694
- Print publication:
- October 1994
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Stresses in Ion Assisted Deposited Oxide Thih Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 929
- Print publication:
- 1993
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