5 results
Electromechanical properties of amorphous and microcrystalline silicon micromachined structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A26.4.1
- Print publication:
- 2001
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Low Temperature Thin-Film Microelectromechanical Devices on Plastic Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A21.2
- Print publication:
- 2000
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Application of Thin-Film Micromachining for Large-Area Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 557 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 799
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- 1999
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Application of Thin-Film Micromachining on Glass
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- Journal:
- MRS Online Proceedings Library Archive / Volume 507 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 85
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- 1998
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Amorphous Silicon Thin-Film Transistors with a Hot-Wire Active-Layer Deposited at High Growth Rate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 467 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 905
- Print publication:
- 1997
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