8 results
Optimization of Fluorine Co-implantation for PMOS Source and Drain Extension Formation for 65nm Technology Node
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C5.8
- Print publication:
- 2004
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Practical Aspects of Forming Ultra-Shallow Junctions by Sub-keV Boron Implants
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- Journal:
- MRS Online Proceedings Library Archive / Volume 568 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 55
- Print publication:
- 1999
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Characterisation of Low Energy Boron Implantation and Fast Ramp-Up Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 227
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- 1998
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Anomalous Diffusion of Ultra low Energy Boron Implants in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 59
- Print publication:
- 1997
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Near and SUB-keV Boron Implantation and Rapid Thermal Annealing: a Sims and Tem Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 325
- Print publication:
- 1997
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Deep Levels Induced by SiCI4 Reactive Ion Etching in GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 325 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 443
- Print publication:
- 1993
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Defect Penetration During the Plasma Etching of Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 775
- Print publication:
- 1992
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Nanostructure Fabrication: Dry Etching Damage
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- Journal:
- MRS Online Proceedings Library Archive / Volume 236 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 223
- Print publication:
- 1991
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