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A simulation study for defects in sub-15 nm line-space using directed self-assembly
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1750 / 2015
- Published online by Cambridge University Press:
- 21 April 2015, mrsf14-1750-kk05-18
- Print publication:
- 2015
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- Article
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Directed self-assembly lithography for half-pitch sub-15 nm pattern fabrication process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1750 / 2015
- Published online by Cambridge University Press:
- 08 April 2015, mrsf14-1750-kk06-04
- Print publication:
- 2015
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- Article
- Export citation