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CMP Challenges for Advanced Technology Nodes beyond Si
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- Journal:
- MRS Advances / Volume 2 / Issue 51 / 2017
- Published online by Cambridge University Press:
- 09 May 2017, pp. 2891-2902
- Print publication:
- 2017
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- Article
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SiC Nanowires by Silicon Carburization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 963 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0963-Q11-03
- Print publication:
- 2006
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- Article
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Time Resolved Photoconduction Studies of Uniformly Doped and p-n Junction Si Nanowires
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- Journal:
- MRS Online Proceedings Library Archive / Volume 958 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0958-L10-36
- Print publication:
- 2006
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Epitaxial Growth and Characterization of SiC on Different Orientations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 911 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0911-B09-01
- Print publication:
- 2006
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- Article
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