Plate-like β-FeSi2 bulk crystals with size of 10×10 mm2 and thickness of 1 mm were fabricated by annealing CVT (chemical vapor transport)-grown plate-like α-Fe2Si5 at 800°C in Ar atmosphere. Before annealing, α-Fe2Si5 crystals were characterized by x-ray diffraction (XRD) and scanning electron microscopy (SEM) to be single crystals with flat surfaces. XRD measurements of β-FeSi2 crystals subjected to annealing showed that they had a po lycrystalline structure. The mean Fe/Si co mposit ion rat io of β-FeSi2 crystal measured by energy dispersive x-ray spectroscopy (EDX) was 31/69 and it was the same as that of α-Fe2Si5 bulk crystal before annealing. SEM, Raman scattering and electron probe micro-analysis (EPMA) measurements identified that there existed small Si precipitates mixed in the matrix of β-FeSi2 crystals. At annealing temperature of 800°C, the plate-like β-FeSi2 bulk was obtained even the annealing duration time was as short as 5 hours.