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Pattern Transfer Process Using Innovative Polymers in Combined Thermal and UV Nanoimprint Lithography (TUV-NIL)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1002 / 2007
- Published online by Cambridge University Press:
- 17 March 2011, 1002-N03-01
- Print publication:
- 2007
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- Article
- Export citation