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Fabrication of Micromachined Piezoelectric Diaphragm Pumps Actuated by Interdigitated Transducer Electrodes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 741 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, J5.7
- Print publication:
- 2002
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- Article
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Preparation and Characterization of Pb(Zr, Ti)O3 Thin Films by Metalorganic Chemical vapor Deposition Using a Solid Delivery System
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- Journal:
- Journal of Materials Research / Volume 15 / Issue 6 / June 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1284-1290
- Print publication:
- June 2000
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- Article
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