3 results
The Development of a Direct-Polish Process for STI CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F5.10
- Print publication:
- 2003
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Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 613 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, E8.6.1
- Print publication:
- 2000
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Using Wafer-Scale Patterns for CMP Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 613 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, D11.8.1/E8.8.1
- Print publication:
- 2000
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