High-entropy alloys (HEAs) with multiple principal elements open up a practically infinite space for designing novel materials. Probing this huge material universe requires the use of combinatorial and high-throughput synthesis and processing methods. Here, we present and discuss four different combinatorial experimental methods that have been used to accelerate the development of novel HEAs, namely, rapid alloy prototyping, diffusion-multiples, laser additive manufacturing, and combinatorial co-deposition of thin-film materials libraries. While the first three approaches are bulk methods which allow for downstream processing and microstructure adaptation, the latter technique is a thin-film method capable of efficiently synthesizing wider ranges of composition and using high-throughput measurement techniques to characterize their structure and properties. Additional coupling of these high-throughput experimental methodologies with theoretical guidance regarding specific target features such as phase (meta)stability allows for effective screening of novel HEAs with beneficial property profiles.

Titanium–tantalum based alloys can demonstrate a martensitic transformation well above 100 °C, which makes them attractive for shape memory applications at elevated temperatures. In addition, they provide for good workability and contain only reasonably priced constituents. The current study presents results from functional fatigue experiments on a binary Ti–25Ta high-temperature shape memory alloy. This material shows a martensitic transformation at about 350 °C along with a transformation strain of 2 pct at a bias stress of 100 MPa. The success of most of the envisaged applications will, however, hinge on the microstructural stability under thermomechanical loading. Thus, light and electron optical microscopy as well X-ray diffraction were used to uncover the mechanisms that dominate functional degradation in different temperature regimes. It is demonstrated the maximum test temperature is the key parameter that governs functional degradation in the thermomechanical fatigue tests. Specifically, ω-phase formation and local decomposition in Ti-rich and Ta-rich areas dominate when T max does not exceed ≈430 °C. As T max is increased, the detrimental phases start to dissolve and functional fatigue can be suppressed. However, when T max reaches ≈620 °C, structural fatigue sets in, and fatigue life is again deteriorated by oxygen-induced crack formation.

The complete ternary system Co-Al-W was fabricated as a thin film materials library by combinatorial magnetron sputtering. The materials library was investigated using high-throughput characterization methods such as optical measurements as well as automated resistance screening. The obtained data indicate possible phase regions and compositional regions which show early surface oxidation. The demonstrated approach illustrates that using high-throughput measurement methods provides a fast access to data of relatively unexplored materials systems. The gained data provides a valuable basis for further in-depth studies of the investigated materials systems.

Shape memory alloy (SMA) thin films are used as actuator materials in MEMS due to their unique properties. Binary thin films with a composition close to Ni50Ti50 are well-established materials, whereas ternaries like NiTiCu, NiTiPd, NiTiHf are less studied. Furthermore, new alloys are being developed which show a magnetic shape memory effect, e.g. Ni2MnGa. For the optimization of known, and the development of new, SMA thin films, a fast and reliable characterization technology is needed, which rapidly identifies the transformation temperatures (i.e. martensite and austenite start and finish temperatures) for a range of material compositions deposited on a whole wafer. In this paper, automated temperature-dependent resistance measurements are discussed as a means which yields the thermal hysteresis of the investigated thin films. Results of monitoring the uniformity of shape memory film depositions on the wafer level, as well as results on the use of this method as a tool for screening for new SMA films by characterization of materials libraries are reported.

This paper discusses the design and use of gradient annealing devices. Generally, it is intended to use such devices for the rapid optimization of thin film materials by simultaneous thermal processing at different temperatures. Furthermore, these devices are efficient for short- time annealing experiments. They are used in order to quickly vary the annealing parameters (temperature, time) from sample to sample. Here, nanoscale Fe/Pt multilayer precursor thin films for the fabrication of hard magnetic Fe-Pt thin films are investigated as a test system. First results prove the usefulness of the gradient annealing devices for high-throughput experiments.

Ferroic materials are ideally suited for actuators in MEMS applications. Ferro- elastic materials, i.e. shape memory alloys (SMAs), produce a significant, o. o. 104 microstrain, phase transformation induced thermoelastic eigenstrain. Rare earth based ferromagnetic materials possess large, o.o. 103 microstrain, saturation magnetostriction which can be developed at fields of the order of mT readily achieved in MEMS geometries. This paper discusses the essentials of the thermoelastic stress evolution in SMA/Substrate bimorphs and of the development of rare earth based ferromagnetic multilayers. SMA actuationunder the constraint of a substrate and the optimization of the multilayers are emphazized.