5 results
Mechanism of Dopant Activation Enhancement in Shallow Junctions by Hydrogen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 864 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, E9.28
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- 2005
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Influence of Atomic Hydrogen on Nickel Silicide Formation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C4.6
- Print publication:
- 2004
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Enhancement of Boron Activation in Shallow Junctions by Hydrogen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C7.6
- Print publication:
- 2004
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Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 813 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, H4.2
- Print publication:
- 2004
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Influence of Hydrogen Plasma Treatment on He Implantation-Induced Nanocavities in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 792 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, R3.32
- Print publication:
- 2003
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