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The Stability of Reactively Sputtered WNx Thin Films on III-V Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 343
- Print publication:
- 1994
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- Article
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Thermal Stability of Reactively Sputtered TiN on InP as a Diffusion Barrier
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 561
- Print publication:
- 1992
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- Article
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