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Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane
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- Journal:
- MRS Advances / Volume 1 / Issue 16 / 2016
- Published online by Cambridge University Press:
- 15 February 2016, pp. 1119-1124
- Print publication:
- 2016
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- Article
- Export citation