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Effects of plasma power on the properties of low-k polymerlike organic thin films deposited by plasma-enhanced chemical vapor deposition using the toluene precursor
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- Journal:
- Journal of Materials Research / Volume 15 / Issue 1 / January 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 228-230
- Print publication:
- January 2000
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- Article
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