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Surface Morphology of 6H-SiC on various a-plane using Si2Cl6+C3H8+H2 by Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 640 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, H2.10
- Print publication:
- 2000
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- Article
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