3 results
Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E04-03
- Print publication:
- 2008
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- Article
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Residual Gases and Their Influence on Processes in the Atmospheric Rapid Thermal Processing Equipment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 45
- Print publication:
- 1998
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- Article
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Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 17
- Print publication:
- 1991
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- Article
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