1 results
Properties of Heteroepitaxial 3C-SiC Layer on Si Using Si2(CH3)6 by CVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 572 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 191
- Print publication:
- 1999
-
- Article
- Export citation