4 results
Calibration of Wafer Temperature to Nist Traceable Standards Using an Isothermal Cavity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 115
- Print publication:
- 1998
-
- Article
- Export citation
Model Based Temperature Control in RTP Yielding ±0.1 °C accuracy on A 1000 °C, 2 second, 100 °C/s Spike Anneal
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 109
- Print publication:
- 1998
-
- Article
- Export citation
Study of Repeatability, Relative Accuracy and Lifetime of Thermocouple Instrumented Calibration Wafers for RTP
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 17
- Print publication:
- 1997
-
- Article
- Export citation
The Influence of Facility Conditions on A ±0.25 °C Repeatability Lamp Voltage Controlled RTP System
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 181
- Print publication:
- 1997
-
- Article
- Export citation