2 results
Oxide-nitride-oxide Dielectric Stacks with Embedded Si-nanoparticles Fabricated by Low-energy Ion-beam-synthesis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 997 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0997-I03-10
- Print publication:
- 2007
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- Article
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Processing of Silicon Oxides Thin Films by Thermal LPCVD Starting from Teos Mixtures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 291
- Print publication:
- 1996
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- Article
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